Mini-course Information
Mini-Course Presentations
Mini-Course 1: Plasma Processing for Semiconductor Manufacturing
Important Dates |
OCTOBER 20, 2026: Abstract Submission Opens |
TBD: Registration Opens |
JANUARY 11, 2027: Abstract Submission Deadline |
JANUARY 31, 2027: NPSS Awards Nominations Deadline |
MARCH 16, 2027: Abstract Acceptance Notification |
TBD: Student Travel Grant Deadline |
TBD: Early Registration Ends |
April 22, 2027 by 5PM PT: Hotel Room Reservations Deadline |
TBD: Deadline to submit to the Special Issue on Plenary and Invited Talks from ICOPS 2027. Additional Journal submission information can be found HERE. |
Contact Us
For inquiries about exhibit/sponsorship opportunities, paper submissions, or general information, please contact the ICOPS 2027 organizing committee at icops2027@ieee.org.
Be sure to visit us again as we release exciting updates about the conference leading up to May 2027.